1200℃ Chemical Vapor Deposition CVD System

Model：KJ-T1200-S6044-LK-Z

Description：

KJ-T1200-S6044-LK-Z CVD System With High Vacuum Degree consists of a 60mm-daimeter 1200℃ tube furnace, a four-channel gas-mixing unit with mass flow meters, and a vacuum pump unit.

Range of Application:
CVD system is widely used to product high-quality sio2 film, si3N4 film, diamond film, hard thin film, optical thin film, CNT, etc. in laboratories, other research institutes and enterprises.

Parameters:

Product name	1200℃ Chemical Vapor Deposition CVD System
Model	KJ-T1200-S6044-LK-Z
Tube Furnace	Structure	Non-split type
	Insulation layer	Alumina ceramic fiber
	Max. Temperature	1200℃
	Working Temperature	≤1100℃
	Heating Rate	20℃/min (Suggestion 10℃/min)
	Heating Zone Length	300mm (Single Zone)
	Heating Element	Electric wire with
	Temperature Sensor	K-type thermocouple
	Temperature Control Accuracy	±1℃
	Tube	Alumina ceramic tube Φ50, 60, 80mm available
	Temperature Controller	PID automatic control with 30 programmable segments for precise control Easy-operation touchscreen control is available.
	Sealing	Flanges made of 304SS Gas valve on left flange Vacuum angle valve with KF25 connector on the right flange Note: Standard flange, KF flange and hinge flange are available.
	Power Supply	Single phase, 220V, 50Hz.
	Power	Power 5kW
Vacuum pump unit	Vacuum pump (With movable box)	10pa with a mechanical vacuum pump
	Pressure Gauge	Digital Pressure Gauge with high accuracy Measurement Range 1×105--1×10-5Pa
Gas-Mixing Unit with mass flow meters	Four precise mass flow meters (0.02% accuracy) with LED displays are installed on the front panel to control gas flow rate manually. One gas mixing tank is installed on the bottom case. MFC 1: Gas flow range from 0~100 SCCM MFC 2: Control range from 0~200 SCCM Gas inlet fitting: four 1/4NPS. Gas outlet fitting: four 1/4NPS. Power: 185-220VAC 50/60Hz Stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas.
Chiller (Optional)	Be used to cool the tube and vacuum pump.
Notes	Pressure higher than 1.02Mpa will break the tube. Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply. No vacuum condition is allowed when the temperature is higher than 1000℃. Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube. If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.
Warranty	One year with lifetime technical support.